---
title: "Senior Process Engineer at Axcelis… – Beverly, MA"
canonical: "https://www.metaintro.com/job/senior-process-engineer-at-axcelis-technologies-inc-e3d609fe-545f-552a-9028-ee6d02535298"
language: "en"
author: "Metaintro"
---

[/company/axcelis-technologies-inc](/company/axcelis-technologies-inc)[Axcelis Technologies, Inc.](/company/axcelis-technologies-inc)
# Senior Process Engineer at Axcelis Technologies, Inc.

Compensation · Listed in posting

$117,768 – $176,652/yr

**Location**
: Beverly, Massachusetts

**Type**
: Full-time

**Level**
: not_specified

**Posted**
: Jun 4, 2026

## Description

The role characterizes semiconductor tool performance by defining operational parameters, maintaining tool data packages, collecting customer and SPC performance information, supporting equipment demonstrations, coordinating with marketing and systems engineers, identifying new applications, and documenting tool upgrades. The position is associated with Axcelis and lists a U.S. base salary range of $117,767.73 to $176,651.59.

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